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SEMI C44-0514 (technical revision)
orgで入手可能となる。初版は2003年7月発行，前版は2006年7月に発行された。
The use of AFM for measuring the roughness of polymer surfaces is outlined in this test method
the back surface
This document describes the method to measure the abrasive characteristics of molding compounds by measuring mold orifice weight loss as a function of molded volume
S02300 - SEMI S23 - Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment Revision:SEMI S23-1021E2 - Current SEMI C44-0514 (technical revision)E This Standard was editorially modified in April 2023 to correct an error. A change was made to Equation R2 22. This Guide addresses concepts related to energy, utilities, and materials use efficiency of semiconductor manufacturing equipment (SME). This Guide is intended to be a tool that can be used to analyze energy, utilities, and materials use by SME. This Guide also addresses measurements related to energy, utilities, and materials use in SME.
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