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SEMI S2-0200 (complete rewrite)
and other similar packaging substrates
The International System of Units (SI) is used as the standard unit of measure in this Document
near the top surface region of the wafer
本文書の目的は，トランス1，2ジクロロエチレンに対して要求が認められたグレードのガイドラインを示す。
M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications StdTpc-Sensor Actuator Network SEMI S2-0200 (complete rewrite)This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. Initially available at www. semi. org in October 2010. Originally published November 2001; previously published July 2007. NOTICE: This document was balloted and approved for withdrawal in 2010. This specification defines thin layer silicon on insulator (SOI) wafer
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