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G10200 - SEMI G102 - Specification for Shear Strength of Encapsulation Materials for Wafer Level Packaging and Panel Level Packaging StdTpc-Fire Safety SEMI M53-1103 (technical revision)

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SEMI M53-1103 (technical revision)

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This document covers requirements for dichlorosilane (SiH2Cl2) used in the semiconductor industry

G10200 - SEMI G102 - Specification for Shear Strength of Encapsulation Materials for Wafer Level Packaging and Panel Level Packaging StdTpc-Fire Safety SEMI M53-1103 (technical revision)Mold resin material characteristics are specified for legacy packages such as leaded and ball grid array packages, but there is no specification for encapsulation characteristics for wafer level packaging (WLP) and panel level packaging (PLP). Three different types of encapsulations such as liquid, granular and sheet material are used for WLP and PLP and these requires the different characteristics and performances. The characteristics of

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