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The purpose of this Standard is to provide a generally acceptable specification for communicating the quality of semiconductor equipment data
a basic set of common services (operations) between the FMCS and the FPUs are specified to exchange FPU status information and data
3 This Specification is applicable to any manufacturing equipment that handles substrates
) or specific instance of equipment
SEMI C28-0705 (technical revision)
E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) StdTpc-Chemical & Gas General Specifications The purpose of this Standard* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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