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E03200 - SEMI E32 - 材料搬送管理スタンダード(MMM) StdPbc-1123 5 The purpose of this

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Description

5  The purpose of this technical guide is to make the best practice recommendations regarding materials used in the construction of internal feeders

SEMI C27-0118 (technical revision)

NOTICE: This document was balloted and approved for withdrawal in 2010

本仕様書はフォトリソグラフィ,埋め込み層,およびエピタキシャル層形成後の埋め込み層パターンに関連する埋め込み層付きシリコンエピタキシャルウェーハの特性を規定している。

This test procedure evaluates quantitatively the durability of flat panel display (FPD) glass substrates using reagents employed in FPD production processes

E03200 - SEMI E32 - 材料搬送管理スタンダード(MMM) StdPbc-1123 5 The purpose of thisNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

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