F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdDcs-Inactive as technology advances to smaller

as technology advances to smaller and smaller dimensions for the elements of high-density integrated circuits

SEMI E83-0413 (technical revision)

including float and tempered (or heat strengthened) ultra-thin glass

本仕様は

·        ボックスまたはカセットと装置ロードポートまたは搬送装置との間

F01000 - SEMI F10 - Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials StdDcs-Inactive as technology advances to smallerNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This method provides a uniform procedure to determine the internal pressure required to produce failure of fitting connections made of fluorocarbon materials. This method can be used to characterize tube fitting connections