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E05420 - SEMI E54.20 - Specification for Sensor/Actuator Network Communications for EtherCAT® Revision:SEMI E54.20-0316 - Superseded •Ease of Use

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•Ease of Use

and to insure that the quality of facilities supplied (e

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This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16

E05420 - SEMI E54.20 - Specification for Sensor/Actuator Network Communications for EtherCAT® Revision:SEMI E54.20-0316 - Superseded •Ease of Use1 Purpose 1. 1 This Specification is part of the SEMI Sensor Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the EtherCAT standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor Actuator Network Standard suite and the EtherCAT standard completely and unambiguously defines an open standard providing an industry specific solution to off the shelf interoperability of

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